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 The
8th EUFANET workshop focused on Practical Challenges
of Nanoprobing for Transistor Level, Electrical Characterization. It has been held during the ESREF 2008 conference
in Maastricht, Neederlands. 30 people attended this exiting
workshop where we had great technical exchanges and
discussions which followed the presentations:
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Welcome
and EUFANET status update (download presentation)
Philippe
Perdu, CNES
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Introduction
to FA challenges for future technologies:
nanoprobing key role (download
presentation)
Chrirstian
Boit, TUB
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Reliability
improvement of Atomic Force Probing on copper
(download
presentation)
Philippe
Larré ST Microelectronics
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Application
examples on 65 nm SRAM Transistors and 45
nm technology, sample prep, surface contamination,
and probe tip contact resistance challenges (download
presentation)
Stephan
Kleindiek, Kliendiek nanotechnik
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EBIC,
EBAC, CV, and other advanced nanoprobing
applications
(download
presentation)
Taylor
Cavanah, Zyvex
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Fault
site localization technique by imaging with
nanoprobes
(download
presentation)
Takeshi
Nokuo, JEOL Ltd.
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Practical
challenges of nanoprobing, what can we get
(download presentation)
Matthew
Lefevre, Multiprobe
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Nanoprobing
at Infineon facilities, some feedbacks
(download
presentation)
Andreas
Altes (Infineon)
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Round table (all participants): facing
nanoprobing challenges: end user needs and
nanoprobing solutions: moving forward
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We
thank all the speakers for contributing to the EUFANET
workshop. !
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