The workshop was held during the ESREF 2007 conference
in Arcachon, France, 45 people attended this exiting
workshop where we had great technical exchanges and
discussions on ESD,
ESDFOS and EOS from a Failure Analysis point of view.
ESD and EOS type damages remain at the origin of
a significant percentage of failures despite continuous
efforts to improve IO robustness. Contrary to the general
belief root cause analysis of ESD and EOS damage is
not always trivial. For instance CDM ESD type stress
often bypasses the protection circuitry to cause damages
inside the heart of an IC. With progress in miniaturization
and F/A diagnosis, another ESD type stress, called ESDFOS
(Electrostatic Discharge From Outside-to-Surface), has
been revealed in recent years. This specific type of
surface ESD appears at the wafer- and bare-die-level
and impacts directly device surface passivations. ESDFOS
is caused by robotic assembly process tools and pad
protective structures are useless against such effects.
The interpretation problems of these ESDFOS failures
have also increased by the introduction of new materials,
like copper. Finally ESD/ESDFOS/EOS damages are subject
to a wide range of technologies (logic, analog, RF,
passive, MEMS/ MOEMS) with specific failure modes, making
root cause failure analysis of such damage an even more
challenging task.
During the workshop, the following contributions
were presented:
Welcome and EUFANET status update (Philippe
Perdu, CNES and Felix Beaudoin, CREDENCE)
Introduction into ESD challenges (Peter Jacob,
EMPA)
Electrical and physical signatures of EOS
and ESD defects: ANADEF workgroup report (Philippe Perdu,
CNES)
The difficult art of locating an ESD failure
and identifying its root cause: from physical signature
to latent defect (Marise Bafleur, LAAS)
Influence of CO2 Bubbling (Carbonation) During Semiconductor Wafer Sawing Process (Reinhold Gaertner, Infineon)
We also add a WORD model (newficheEOSESD.dot) from
ANADEF (in French), you can use it and translate it
(free of charge) for EOS/ESD related FA.
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